VAMAS Surface Chemical Analysis Standard Data Transfer Format 1988 May 4
XI Ltd.
XI Spectral Data Processor
XI ASCII
Gold: Au(4f7) & Au(4f5), Cu(2p3) BE= 932.65eV
1
0.05 eV/step, 90 deg TOA, 15 repetitive etch/scans
NORM
REGULAR
1
0
0
0
0
0
1
0.05 eV/step, 90 deg TOA, 15 repetitive etch/scans
Gold: Au(4f7) & Au(4f5), Cu(2p3) BE= 932.65eV
2003
4
25
22
17
22
0
0
XPS
X-RAY Source
1486.6
200
250
1000
55
90
FAT
14.23
1
0
0
1000
2000
55
0
data_1
data_1
-1
Binding energy
eV
95
-0.05
2
counts
d
Transmission
d
pulse counting
0.1
3
4.00E-06
0
0
0
0
802
393
30433
0.376408
0.379103
1885
0.379103
1858
0.379097
1847
0.37909
1846
0.379083
1796
0.379076
1842
0.379069
1807
0.379063
1897
0.379056
1901
0.379049
1809
0.379042
1886
0.379035
1744
0.379029
1816
0.379022
1864
0.379015
1894
0.379008
1766
0.379001
1861
0.378995
1867
0.378988
1893
0.378981
1853
0.378974
1905
0.378967
1857
0.378961
1926
0.378954
1914
0.378947
1944
0.37894
1839
0.378933
1928
0.378927
1935
0.37892
1910
0.378913
1903
0.378906
2005
0.378899
1892
0.378893
1926
0.378886
1827
0.378879
1858
0.378872
1845
0.378865
1831
0.378859
1860
0.378852
1923
0.378845
1941
0.378838
1821
0.378831
1835
0.378825
1849
0.378818
1897
0.378811
1844
0.378804
1821
0.378797
1800
0.378791
1847
0.378784
1826
0.378777
1791
0.37877
1791
0.378763
1839
0.378757
1761
0.37875
1867
0.378743
1741
0.378736
1768
0.378729
1803
0.378723
1800
0.378716
1790
0.378709
1845
0.378702
1780
0.378696
1873
0.378689
1816
0.378682
1761
0.378675
1778
0.378668
1762
0.378662
1812
0.378655
1892
0.378648
1849
0.378641
1837
0.378634
1863
0.378628
1883
0.378621
1855
0.378614
1881
0.378607
1869
0.378601
1865
0.378594
1842
0.378587
1898
0.37858
1922
0.378573
1856
0.378567
1933
0.37856
1921
0.378553
1951
0.378546
1993
0.378539
1989
0.378533
1922
0.378526
1980
0.378519
1952
0.378512
1979
0.378506
1962
0.378499
1996
0.378492
1976
0.378485
1948
0.378478
2048
0.378472
2067
0.378465
2081
0.378458
2131
0.378451
1971
0.378445
2053
0.378438
2075
0.378431
1997
0.378424
1976
0.378417
2053
0.378411
2130
0.378404
2027
0.378397
2043
0.37839
2031
0.378384
1999
0.378377
2098
0.37837
2047
0.378363
2062
0.378357
2077
0.37835
2088
0.378343
2209
0.378336
2307
0.378329
2263
0.378323
2259
0.378316
2334
0.378309
2353
0.378302
2422
0.378296
2425
0.378289
2542
0.378282
2676
0.378275
2659
0.378269
2730
0.378262
2875
0.378255
3063
0.378248
3220
0.378242
3389
0.378235
3458
0.378228
3718
0.378221
4010
0.378214
4304
0.378208
4654
0.378201
5187
0.378194
5573
0.378187
6089
0.378181
6841
0.378174
7740
0.378167
8768
0.37816
10255
0.378154
11804
0.378147
13902
0.37814
16210
0.378133
18793
0.378127
21144
0.37812
23037
0.378113
24294
0.378106
24174
0.3781
23276
0.378093
21631
0.378086
19297
0.378079
17159
0.378073
15297
0.378066
13377
0.378059
11716
0.378052
10232
0.378045
8928
0.378039
7817
0.378032
6727
0.378025
5917
0.378018
5060
0.378012
4520
0.378005
3976
0.377998
3692
0.377991
3328
0.377985
2988
0.377978
2877
0.377971
2599
0.377964
2418
0.377958
2509
0.377951
2310
0.377944
2253
0.377937
2148
0.377931
2092
0.377924
1991
0.377917
1927
0.37791
1994
0.377904
1853
0.377897
1908
0.37789
1911
0.377884
1849
0.377877
1806
0.37787
1793
0.377863
1888
0.377857
1892
0.37785
1778
0.377843
1938
0.377836
1865
0.37783
2086
0.377823
1950
0.377816
2116
0.377809
1984
0.377803
2165
0.377796
2214
0.377789
2300
0.377782
2456
0.377776
2490
0.377769
2726
0.377762
2815
0.377755
2884
0.377749
3043
0.377742
3404
0.377735
3579
0.377728
3905
0.377722
4121
0.377715
4588
0.377708
5036
0.377702
5638
0.377695
6225
0.377688
7064
0.377681
8067
0.377675
9363
0.377668
10619
0.377661
12628
0.377654
14924
0.377648
17712
0.377641
20789
0.377634
24541
0.377627
27723
0.377621
30098
0.377614
30433
0.377607
30319
0.377601
28528
0.377594
25470
0.377587
22703
0.37758
19683
0.377574
17247
0.377567
14982
0.37756
12908
0.377553
11131
0.377547
9544
0.37754
8127
0.377533
6754
0.377527
5947
0.37752
4718
0.377513
3980
0.377506
3412
0.3775
2910
0.377493
2589
0.377486
2280
0.377479
1999
0.377473
1780
0.377466
1709
0.377459
1595
0.377453
1494
0.377446
1349
0.377439
1327
0.377432
1190
0.377426
1110
0.377419
1146
0.377412
1031
0.377406
1041
0.377399
921
0.377392
956
0.377385
876
0.377379
923
0.377372
877
0.377365
861
0.377358
836
0.377352
768
0.377345
778
0.377338
730
0.377332
787
0.377325
724
0.377318
725
0.377311
717
0.377305
684
0.377298
706
0.377291
673
0.377285
701
0.377278
677
0.377271
609
0.377264
626
0.377258
648
0.377251
604
0.377244
597
0.377238
626
0.377231
603
0.377224
556
0.377218
575
0.377211
599
0.377204
595
0.377197
533
0.377191
526
0.377184
533
0.377177
508
0.377171
486
0.377164
487
0.377157
478
0.37715
451
0.377144
498
0.377137
488
0.37713
503
0.377124
433
0.377117
453
0.37711
450
0.377104
487
0.377097
453
0.37709
474
0.377083
424
0.377077
450
0.37707
431
0.377063
489
0.377057
482
0.37705
443
0.377043
446
0.377036
446
0.37703
471
0.377023
429
0.377016
436
0.37701
461
0.377003
428
0.376996
452
0.37699
455
0.376983
440
0.376976
440
0.37697
418
0.376963
393
0.376956
453
0.376949
452
0.376943
446
0.376936
413
0.376929
453
0.376923
460
0.376916
457
0.376909
447
0.376903
443
0.376896
438
0.376889
431
0.376882
413
0.376876
442
0.376869
477
0.376862
396
0.376856
439
0.376849
447
0.376842
427
0.376836
435
0.376829
411
0.376822
436
0.376816
409
0.376809
393
0.376802
416
0.376796
438
0.376789
418
0.376782
447
0.376775
449
0.376769
449
0.376762
450
0.376755
446
0.376749
438
0.376742
426
0.376735
435
0.376729
468
0.376722
429
0.376715
436
0.376709
478
0.376702
459
0.376695
422
0.376689
439
0.376682
417
0.376675
434
0.376669
444
0.376662
434
0.376655
414
0.376649
438
0.376642
452
0.376635
410
0.376628
447
0.376622
462
0.376615
403
0.376608
464
0.376602
455
0.376595
442
0.376588
466
0.376582
451
0.376575
446
0.376568
440
0.376562
464
0.376555
475
0.376548
469
0.376542
505
0.376535
458
0.376528
436
0.376522
443
0.376515
479
0.376508
476
0.376502
479
0.376495
414
0.376488
488
0.376482
498
0.376475
478
0.376468
487
0.376462
493
0.376455
481
0.376448
469
0.376442
447
0.376435
484
0.376428
469
0.376422
487
0.376415
488
0.376408
end of experiment
